MEMS energy harvesters based on silicon and PZT ...

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GRØN DYST 2010 Technical University of Denmark

MEMS energy harvesters based on silicon and PZT thickfilm technology for wireless sensor systems
Paper
Author:Anders Thyssen (Department of Micro- and Nanotechnology, Technical University of Denmark, Denmark)
Adam Stoot (Department of Micro- and Nanotechnology, Technical University of Denmark, Denmark)
Thomas Lehrmann Christiansen (Department of Micro- and Nanotechnology, Technical University of Denmark, Denmark)
Supervisor:Erik Vilain Thomsen (Department of Micro- and Nanotechnology, Technical University of Denmark, Denmark)
Karen Birkelund (Department of Micro- and Nanotechnology, Technical University of Denmark, Denmark)
Date: 2010-06-25     Track: Main     Session: 1
DOI:10.4122/1.1000000088
DOI:10.4122/1.1000000089

In recent years, the concept of energy harvesting has attracted much attention. The basic idea is to scavenge or harvest energy from the ambient surroundings of a device, convert it into electrical energy and use it to power a device, typically a wireless sensor system. The energy harvester can thus be seen as a small local power plant which uses otherwise wasted energy in the form of vibrations, temperature differences etc. which are abundant in most systems. By creating energy harvesters of the same size as modern batteries, the technology therefore has the fascinating future prospect of making batteries redundant. This is therefore a green technology that can be integrated in a wide range of systems, making it highly interesting.